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An investigation into the effect of the electrostatic actuation, non-ideal boundary conditions, and axial force on MEMS arches

Posted on:2012-09-26Degree:M.SType:Thesis
University:State University of New York at BinghamtonCandidate:Alkharabsheh, Sami AFull Text:PDF
GTID:2462390011968445Subject:Engineering
Abstract/Summary:
In this thesis, we present an investigation of the static and dynamic behavior of electrically-actuated-micromachined arches. I;n the first part, we utilize transversal and rotational springs at the arch boundaries to simulate the imperfection at the supports due to fabrication issues. We find that the introduced springs have the effect of softening the structure by reducing its natural frequencies.;In the second part, we study the effect of applying axial forces on the static and dynamic behavior of electrically actuated micromachined arches. We found that when the compressive axial load exceeds the critical buckling limit, two solutions are generated corresponding to unstable and stable configurations.;In the final part, we present a global dynamic analysis for an arch with rotational and transversal springs at its boundaries and make a comparison with experimental data. We find shooting technique is more efficient to capture the global dynamics compared with long-time integration.
Keywords/Search Tags:Dynamic, Effect, Axial
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