Spectroscopic methods for the characterization of thin films of polymer-derived ceramics

Poly(methylsilane) (PMS) has been used as a precursor to form a variety of ceramic materials within the Si-C-N system. Special emphasis was placed on the synthesis of SiC, ;Detailed insight into the chemical transformations occurring during pyrolysis under inert (N;n-type SiC layers doped with nitrogen having a resistivity range suitable for Si/SiC heterojunctions in solar cells were also synthesized on silicon single-crystal wafers. A homogeneous doping procedure was developed that consists of reacting the Wurtz PMS prepolymer with NH;The inclusion of higher concentrations of nitrogen into the ceramic material was studied during the synthesis of ;The effect of the thermal decomposition of NH...