| This thesis describes the simulation and analysis of the use of optical sensing for a MEMS directional microphone.;Diffraction gratings integrated with micro-electromechanical-systems (MEMS) offer an optical sensing scheme with high detection sensitivity, low noise level and compact device structure. An optical sensing method is applied in a hearing aid microphone to detect the movement of the diaphragm due to sound. Diffraction grating fingers are fabricated on both sides of the diaphragm with a gold mirror on top. Two photo detectors are placed on the substrate symmetrically to detect the positive and negative first order diffraction of 850 nm VCSEL light. A finite element analysis model is built in COMSOL to study the light distribution and energy loss. The signal output, predicted using an analytical model is shown to agree well with those obtained using the finite element model. |
