Near-field imaging of microwave circuits with electromagnetic probes

The focus of this thesis is to investigate the feasibility of utilization of non-contact near-field probing techniques with miniature electromagnetic probes to evaluate the performance of Microwave Integrated Circuits (MICs). Unlike conventional microwave measurement methods, non-contact near-field probing techniques are non-invasive and capable of measuring at arbitrary spots within the circuit with potentially high temporal and spatial resolution. The thesis gives an overview on non-contact probing systems currently developed for signal measurement and waveform extraction techniques and near-field mapping and imaging techniques.;For the purpose of investigating the feasibility of non-contact near-field measurement techniques, an automated near-field probing platform was developed. An analytic model of the probing system was derived and discussed.;In order to improve the spatial resolution to enable application to on-wafer microwave circuit probing, a micro-fabricated CPW probe, at a scale less than 100 mum, was evaluated using a micromachining process at the Alberta Microelectronics Centre.;Single-loop and multi-loop magnetic near-field probing was investigated as an alternative to the electric near-field probing technique as a method of production line testing of printed circuit boards. (Abstract shortened by UMI.)...