| The object of this master thesis is the fabrication of an electrostatic micromotor which will serve as the main locomotion system of a microrobot. After comparison of several types of micromotor and the techniques of fabrication which are associated to them, we come to the basic assumption of our work: thin films micromachining can produce an adequate micromotor which will produce enough force to move our microrobot. The dimensions of Walking-Die make it possible to consider this possibility seriously. However, it can only be definitively validated by mechanical tests on structures manufactured. To obtain reliable results in less time, to the usual stages of electromechanical modeling by finite elements and others, we substituted the adoption of a model of traditional inspiration: the side-driven electrostatic micromotor; and the use of a mature thin films manufacturing process: the MUMPS. The layout editor is L-Edit from MEMsCAP. Physical equations, which characterize the electrostatic forces, are used as guidance in the choices made during the design and the consequences of scale reduction are presented. The masks are draw using computer assisted design tools. (Abstract shortened by UMI.)... |
