Modeling and identification of thermally actuated micro-robots

This thesis explains the system identification of thermally actuated micro-robots and actuators developed at UTA-NGS (Next Generation Systems) and ARRI (Automation Robotics Research Institute). The energy used to power these actuators are externally-supplied voltage and class IV Laser sources. The micro-robots actuated with class IV laser sources have displacements recorded through a camera. Applied laser input waveforms and micro-robot's positional displacement are used for system identification of the Micro-robot. Various system identification methods (non-recursive and recursive) are used for creating a mathematical model of the physical system (Micro-robot).;A similar approach is followed for micro-actuators known as chevron actuators powered by externally controlled voltage sources. The micro-actuator displacements are measured through optical interferometer techniques, and the applied input voltage sources properties and displacements are used for system identification.;Finally, system identification is performed to find the relation to the externally applied voltage source and force generated by the actuators. A force sensor with micro precision is used to measure the force generated by the actuators. Applied input voltage source and measured force sensor are used for system identification of the actuators. Both recursive and non-recursive methods are used for system identification of the micro-actuators.