Multi-layer biochip with integrated hollow waveguides

The design and fabrication of a multi-layer microfluidic chip with integrated optics has been realized. The lower layer of the chip is made of silicon and provides the optical functionality of the device. Light guiding between the edge of the chip and the area of interest is achieved by metalized hollow v-groove waveguides fabricated by anisotropic silicon etching. Interfaces between the fluidic and optical layers are provided by the reflective Si (111) end facets of the waveguides. Bonded to the silicon layer is a pyrex upper layer which caps the waveguides and contains etched fluidic microchannels. Fabricated chips were able to successfully guide light between the edge of the chip and the area of interest. The hollow waveguides were used both to guide excitation light as well as collect fluorescence emitted from microparticles. Chip designs intended for capillary electrophoresis, and polymerase chain reaction have been fabricated.