| This thesis presents the design and fabrication of silicon-based two-dimensional slab photonic crystal devices with critical features in sub-micron scale for imaging application. Finite difference time domain (FDTD) simulation software EMPLab(TM) (EM Photonics, Inc., Newark, DE) have been used to design 2-D slab silicon-based imaging photonic crystal devices. Computer aided design (CAD) programs such as LASI7 and Nanometer Pattern Generating System (NPGS) and electron beam lithography system has been used to fabricate sub-micron photonic crystal devices on silicon on insulator (SOI) substrate. Characterization has been done by our research collaborator the University of Colorado at Boulder by utilizing tunable laser light source and infrared camera. (Abstract shortened by UMI.)... |
