| Research and development in microelectromechanical systems (MEMS) have made remarkable progress since late 80's. Micro-machines are an integral part of MEMS. However, these machines are not often discussed in most electric machines, power electronics and drive forums due to the relative newness of these machines.; This thesis provides an in-depth analysis of a variable capacitance micro-machine (VCM). It gives an insight into the effects of machine geometry, on capacitance and torque profiles of the machine. Tangential and radial components of the electrostatic forces in the air gap of the machine have been investigated to explore the effects of mutual flux. These studies have been performed using the finite element model of an 8/6, four phase micro VCM. Furthermore, the analytical modeling of the phase capacitance of the machine has been discussed. Also, dynamic model of the machine has been developed in SIMULINK, to maximize torque/volt of the machine. |
