| This thesis presents modeling and controller design for an atomic force microscope (AFM) which operates in the contact mode with the goal of improving the bandwidth of the system and the precision of the imaging. The construction of the mathematical model provides a comprehensive understanding of the performance of the AFM. Three control architectures are employed to achieve the above requirement. It is demonstrated that an Hinfinity controller provides substantial improvements in the positioning speed and precision comparing to a conventional PID controller. Moreover, the implementation of the designed controllers on a floating-point DSP board is addressed in detail. |
