| 65%Pb(Mg1/3Nb2/3)O3-35%PbTiO3 (65PMN-35PT, or PMN-PT) is a highly piezoelectric ceramic with superior piezoelectric coefficients over the more popular Pb(Zr0.5Ti0.5)O 3 (PZT). Because of its complex chemistry and high volatility of lead above 1000°C, the perovskite phase of PMN-PT is hard to process and has prevented PMN-PT from various piezoelectric applications, especially in the new area of piezoelectric micro-electro-mechanical systems (PMEMS) involving thick or thin piezoelectric films. In this thesis, a novel precursor suspension method is introduced that substantially lowers the sintering temperature of PMN-PT to 850°C from a PMN precursor powder made by coating Mg(OH) 2 on Nb2O5 particles. The precursor suspension method entails suspending PMN powders in PT precursor and uses the reaction sintering capability of PMN with nano-sized PT in the temperature range of 800°C∼1000°C. Moreover, free-standing PMN-PT thick films were obtained by tape casting the PMN-PT powder. This new geometry of PMN-PT shows giant electric-field enhanced piezoelectric responses comparable with those of single crystals. As an example of application, the PMN-PT thick film is bonded to a thinner layer of copper by electroplating and made into piezoelectric cantilever sensors. In conclusion, the colloidal suspension processing method produces free-standing PMN-PT thick films with ultrahigh piezoelectric properties. |
