Development of a process for fabricating high aspect ratio parylene microstructures

PARYLENE (poly-para-xylyene) is mostly used as a conformal protective plymer pin-hole free coating material to uniformly protect any component configuration on diverse substrates. This thesis describes in detail how the unique properties of parylene can be conveniently combined with MEMS technology to meet biocompatibility requirements of biological and chemical applications and develop unique microstructure shapes. Since etching of parylene is not readily possible, the best way to mold it into any shape would be to etch hollow molds in silicon and deposit parylene in them. It is easy to etch away the silicon mold for releasing these parylene structures. Parylene is non-reactive in wet etchants (like TMAH or KOH) that are used to etch silicon. These microstructures can be helpful in implants and other biomedical applications.; CAD tools were used to simulate the mask features for designing this microstructure and to layout the photomask pattern. A fabrication procedure is devised form these simulation results and the process is implemented in a Class 100/1000 Cleanroom facility at the Lutz Micro/Nanotechnology Cleanroom core facility, University of Louisville. A complete guide to fabricate this MEMS-based parylene structure is provided in this thesis project. Important observations, complete experimental procedure and results are discussed in detail. (Abstract shortened by UMI.)...