Superconducting hot electron bolometers for terahertz sensing

Superconducting Hot Electron Bolometers (HEBs) are good candidates for detecting weak signals in the submillimeter or terahertz range. In this thesis work, a novel fabrication method was developed to make two types of niobium HEBs for different applications. HEBs were designed, fabricated, and then characterized at dc, microwave, and THz frequencies.; The first type is a diffusion-cooled HEB, made with a short bridge that determines its cooling time. In this thesis, bridges were typically 400 nm long with bandwidths of about 1 GHz. These diffusion-cooled HEBs were developed as part of a collaboration with the University of Arizona (UA), to develop a proof-of-concept heterodyne array submillimeter camera. Devices were fabricated on thin fused quartz and silica substrates for waveguide coupling in the UA system for the astrophysically interesting 345 and 810 GHz atmospheric windows. The goal of this collaboration is to provide a basis of comparison between Nb diffusion-cooled HEB mixers and superconductorinsulator-superconductor mixers at these frequencies.; The second type is a phonon-cooled HEB, made with a ∼3 mum long bridge. Its thermal response is dictated by the electron-phonon relaxation time. These devices were developed in collaboration with Prof. C. Schmuttenmaer's lab in the Yale Chemistry department, Prof. G. Blake at Caltech, and Dr. J. Pearson at the Jet Propulsion Laboratory. These devices were developed for use in quasi-optic systems to be used as fast (>100 MHz) direct detectors that can view room temperature sources without saturating. A variety of experimental applications are envisioned for these detectors including charge transport measurements of novel materials.; A series of dc and microwave measurements were performed on the diffusion-cooled devices. A better understanding of the resistance vs. temperature profile was realized, including what design/fabrication parameters affect it and insight into how it affects device performance. This led to a do screening process that can identify good quality devices.; The Nb phonon-cooled HEBs studied in this thesis were fully carried through the design, fabrication, and characterization process at dc, microwave and THz frequencies. The saturation power, responsivity, thermal response time, and noise performance were all measured to be within the expected range predicted by the initial design parameters.