| Commercial micro electro mechanical systems (MEMS) is already a ;In this thesis we concentrate on optical MEMS with nanoscale elements (NEMS). Four devices serve as a core of the dissertation---new pixel for high-efficiency display technology, photonic-plasmonic interconnect, optical resonance sensor for micro-composites and field induced guide light modulator. These devices are studied using the formula DEVICE=DESIGN+MATERIAL.;At micro- and nano-scale the significance of the material properties is hard to overestimate. For each of the mentioned devices this dissertation describes unique properties of the materials used and how they help to achieve the new functionality. At the same time careful and creative design is required to fully leverage the potential of the materials and fabricate powerful devices. |
