Resonant micro and nanoelectromechanical systems: Actuation and biological sensing studies

This thesis explores various actuation mechanisms of resonant nanoelectro-mechanical systems (NEMS) with emphasis directed towards detection of biomolecules. Arrays of bulk and surface micromachined devices, made using conventional thin film fabrication methods, are used to explore the mass loading effects of selective molecular immobilization on the surface of the NEMS resonators. Experimentally measured shift in the first eigenfrequency is correlated to the amount of mass loading from the binding events and verified using theoretical constructs. Under ambient conditions where considerable damping occurs, immunospecific detection of single Escherichia coli O157:H7 cells is demonstrated by measuring the out of plane vibrational resonant mode using an optical deflection system with thermal noise as an excitation mechanism.;Further sensitivity enhancement utilizing vacuum encapsulation in conjunction with piezoelectric actuation and tailoring of the cantilever dimensions is demonstrated by measuring mass loading of a nonpathogenic insect baculovirus, single Aminopropyltriethoxysilane (APTS), Hexamethyldisilazane (HMDS) and Octade-cyltrichlorosilane (OTS) monolayers. To highlight the lower detectable mass limit, surface machined NEMS oscillators with integrated circular Au contacts and sub-attogram mass detection sensitivity are used for selective immobilization of dinitrophenyl poly(ethylene glycol) undecanthiol based molecules.;Experimental and theoretical elucidation of optical actuation of NEMS cantilevers at large distances from the clamped end is presented. These observations are considered within the theoretical framework of heat transfer and used to measure binding events of single double-stranded deoxyribonucleic acid (dsDNA) molecules to localized gold nanodots near the free end of a NEMS oscillator. Because this method allows direct coupling of energy into the device layer, several modes of in-plane vibrations are observed and employed in shaking off spherical latex particles.;Finally, this thesis describes studies of dynamic detection of vibrational characteristics of suspended NEMS oscillators through direct coupling with a micromechanical probe. Changes in the dynamic amplitude and phase of the probe allow the measurement of the mechanical quality factor. Measured spectral response of the NEMS is in good agreement with optical characterization and modelling results.