Elastically stretchable thin film conductors on an elastomeric substrate

Imagine a large, flat screen television that can be rolled into a small cylinder after purchase in the store and then unrolled and mounted onto the wall of a home. The electronic devices within the television must be able to withstand large deformation and tensile strain. Consider a robot that is covered with an electronic skin that simulates human skin. The skin would enable the machine to lift an elderly person with care and sensitivity. The skin will endure repeated deformation with the highest tensile strains being experienced at the robot's joints. These applications and many others will benefit from stretchable electronic circuitry. While several different methods have been employed to create stretchable electronics, all methods use a common tool -- stretchable conductors. Therefore, the goal of this thesis work was to fabricate elastically stretchable conductors that can be used in stretchable electronics. We deposited Au thin films on an elastomeric substrate, and the resulting conductors remained electrically continuous when stretched by 30% and more. We developed photolithographic processes that can be used to pattern elastically stretchable conductors with a 10 mum resolution. We fabricated bi-level stretchable conductors that are separated by an elastomeric insulator and are electrically connected through via holes in the insulator. We applied our bi-level conductors to create a stretchable resistor-inductor-capacitor (RLC) circuit with a tunable resonant frequency. We also used stretchable conductors to measure action potentials in biological samples. This thesis describes the fabrication and application of our elastically stretchable conductors.