| SPM tips are typically produced by MEMS processing methods, which limit the possible geometries and solid cross sections of the resultant cantilevers. In contrast, the ease of molding of pre-ceramic polymers may enable a wider variety of cantilever geometries, in particular those capable of extremely high frequency oscillations and therefore suitable for high speed SPM techniques.; The fabrication of a ceramic material with nanoscale features via the soft lithography method is demonstrated in this study, and applied to the production of cantilevers for SPM.; A nanostructured silicone mold is cast using a silicon master; the pattern is then transferred to a pre-ceramic precursor polymer via soft lithography. The pre-ceramic polymer, following curing, is convened to silicon carbide (SiC) using a single step pyrolysis process.; The materials produced are characterized by atomic force microscopy and scanning electron microscopy. |
