The rapid development of fiber Bragg grating sensing technology puts forward higher requirements on wavelength demodulation technology,the traditional tunable optical filter based on piezoelectric ceramic performance have a lot of limitations,miniaturization,integration,narrow linewidth,electric control,high-speed tuning have become the target of study,the research of silicon-based optical waveguide devices for new filter provides a new technical means.Firstly this paper describes the coupling principle of si-based grating and the wavelength modulation principle of electronic control wavelength modulation filter.Modulation method of wavelength modulation filter include thermo-optic modulation and electro-optical modulation.In Chapter IV this paper simulates the character silicon grating by RSOFT.Including: simulate the mode field distribution of si-based grating,the refractive index distribution of si-based grating and transmission spectrum of si-based grating.Change the width of teeth,length and other parameters of si-based grating,observe the changes about transmission spectral line width of the si-based grating,in order to optimize the design parameters of si-based grating.By changing the refractive index of the silicon,we simulate the thermo-optic modulation of si-based grating wavelength modulation filter indirectly,provides emulational foundation about the design of si-based grating modulation structure.In Chapter V,this paper designs the structure of silicon-based grating electronic control wavelength modulation filter and the technological process of parts.In this paper,the silicon-based optical fiber filter we studied has advantages of small size,high integration and flexible modulation,in the field of optical fiber grating sensor demodulation has broad application prospects. |