Research On Robust Control Of Planar Precision Magnetic Bearings

In recent years,the level of science and technology has been continuously improved and innovative,and new technologies are constantly being produced,but people have also begun to discover that the development of science and technology is gradually reaching the edge,more sophisticated instruments and components are needed,so semiconductor processing technology It began to highlight its unique significance.Planar magnetic bearings do not need to contact.Because of its unique structure,it has many advantages such as high precision,no friction,multiple degrees of freedom,and the ability to work in a vacuum environment without the help of other media.Therefore,it is expected to become a lithography machine The important components of the worktable part,however,the planar magnetic suspension bearing itself has strong coupling,its model and parameters are uncertain,and it is susceptible to external nonlinear interference,and the robust performance is difficult to guarantee.With the advancement of control technology,the above problems can be effectively solved if a reasonable control strategy is adopted.Therefore,the control strategy of planar magnetic bearings has also become a hot issue in recent years.The main research work of this article is divided into the following aspects:First of all,the related materials were consulted to understand the current status of planar magnetic levitation bearings at home and abroad,including the content of planar motors and their support methods.By analogy,the basic structural principles of magnetic levitation bearings and the basics of planar motors were analyzed Structural principle,and positioning of different types of magnetic levitation platforms.Then,a specific analysis of the planar magnetic levitation bearing is carried out,so the relevant parts of the torque and the magnetic circuit are also studied.The idea of ??the backstepping method and proportional integral differential control are used to further levitation the magnetic levitation bearing.Research on control and thrust control of magnetic levitation,using sensor technology to determine the coordinates of the T-shaped mover in the y direction,and the rotation angle value,to conduct derivation calculations and establish its mathematical model.Thirdly,the control strategy of the planar magnetic bearing isanalyzed.In view of the general control idea,the parameters of the controller often remain fixed.The idea that adaptive control can be identified and updated online is explained.The analysis of the adaptive controller may be adversely affected when it is disturbed.In view of the shortcomings of this method,the idea of ??deterministic robust control is analyzed to verify that it can suppress the interference.Finally,several control methods are analyzed.In order to synthesize its advantages and achieve better control results,a new control method is proposed,an adaptive robust control method,which is applied to planar magnetic levitation bearings,simulation experiments,It proves that its anti-interference ability and tracking performance have been improved,and its robustness has been improved.