Multi-view Surface Topography With Structured Illumination Microscopy

Three-dimension(3D)surface topography technology plays a crucial role in mechanical processing,nanotechnology and biomedicine,including scanning white light interference microscope,reflection confocal microscope,digital holographic microscope and optical sectioning structured illumination microscopy(OS-SIM).OS-SIM has been demonstrated that is suitable for 3D surface topography and has the advantages of high speed,full color and high resolution.However,OS-SIM as well as other surface topography measurement techniques has a fundamental numerical aperture(NA)limit in the range of surface slopes to be captured in detection of specular reflections.When imaging an object with highly tilted surfaces,the reflected light cannot be collected by the objective lens.This causes the loss of information in the imaging results.In this thesis,we develop a new approach to address the information loss problem based on multi-view measurement.The majority of the researches are outlined as below:1.We demonstrate a multi-view object topography measurement with optical sectioning structured illumination microscopy.Previous OS-SIM has a fundamental NA limit in the range of surface slopes to be captured in detection of specular reflections which causes the loss of information in the imaging results of object with highly tilted surfaces.We intend to acquire optical sectioning images from multiple directions via rotating the sample.The multi-view fusion algorithm is used to complete the information loss in the image of a single perspective.A more complete 3D surface topography of the sample can be obtained finally.This method solves the information loss problem in the surface topography measurement of steep slope of objects and is of great significance to the topography measurement of complex surfaces.2.We demonstrate a multi-view fusion algorithm of optical sectioning images to achieve the topography measurement of complex surfaces.The core steps of the fusion algorithm include 3D-data rotation and 3D-data stitching.Converting 3D images from different perspectives into the same coordinate system and fusing these results,we can obtain more complete sample imaging results.Finally,the experiment results prove that the collection range of the system with NA=0.3 is comparable with NA=0.46.3.We develop a compact multi-view OS-SIM imaging system.The physical dimensions of the system are 47 cm(length)× 30 cm(width)× 32 cm(height)including displacement module,structured illumination generation module,optical imaging module and automatic control module.The displacement module is used to rotate and translate the sample,the structured illumination generation module is used to generate structured light,and the optical imaging module is used to image the sample.The synchronization control of different hardware devices is implemented using the custom-developed Multi-view Image Scan software written in Matlab.The system is able to realize 3D imaging for reflective samples with highly tilted surfaces.