Research On SOI-based Tunable Optical Filter And Heterogeneous Integration

In order to meet the needs of massive data transmission and ultrahigh-speed information processing,optical interconnection technology with advantages of large bandwidth,low delay and low loss will become a major development trend in the future.In optical interconnect systems,high-performance optical filters are the core components for multichannel wavelength division multiplexing and dense wavelength division multiplexing.In the field of microwave photonics,the application of optical filters to microwave signal processing can achieve greater bandwidth,lower signal delay,and greater resistance to electromagnetic interference than microwave filters.In this thesis,a single-mode optical waveguide and a vertically coupled fan-shaped grating were designed to achieve a high efficient optical transmission.In addition,the transfer function of the microring resonators and the influence of micro-ring structure parameters(coupling coefficient,loss factor,etc.)on the output characteristics of the filter were analyzed.Moreover,a modified structure of the Mach-Zehnder interferometer(MZI)coupler in the coupling region of the filter was adopted to achieve the tunability of the bandwidth and the central resonant wavelength of the filter.Lastly,a design of combination of asymmetric MZI couplers and microring resonators was used to meet the high rectangularity and large bandwidth filtering requirements.Based on theoretical research and optimization design,the fabrication process of silicon-on-insulator(SOI)microring filter was explored,including electron-beam lithography,inductively coupled plasma(ICP)etching,and evaporation stripping.Next,the output optical response characteristics of the filters were tested by the self-built optical test platform.Furthermore,a tunable microwave photonic notch filter was developed,and a good performance of high rejection ratio greater than 50 dB,and the tunabililty bandwidth and resonant center frequency were achieved.Finally,the heterogeneous integration technology between SOI filter and InP detector was explored,which provides an implementation path for large-scale photonic heterogeneous integration on a chip.