Design And Simulation Of Thin Film Bulk Acoustic Resonator For 5G Communication

With the development of communication technologies to higher frequency bands,especially the upcoming 5G communication technology(fifth generation mobile communication technology),its working frequency band is higher than the existing 3G and 4G communication standard frequency bands,and the RF front-end devices are proposed.High requirements.The filter and duplexer formed by the FBAR-Film Bulk Acoustic Resonator can work in higher frequency bands with high Q factor and small package size,which facilitates the integration and miniaturization of the RF front-end.It is suitable for mini-terminal products such as mobile phones and has become the best solution for frequency selection control in high-frequency communication field.This paper studies the design,modeling and simulation of film bulk acoustic resonators for 5G communication.Based on the piezoelectric theory and electrical characteristics of FBAR,the impedance analysis expression of FBAR is derived by reduction.The Mason model was used to model and simulate the electrical properties of FBAR,and an FBAR unit conforming to one of the 5G communication bands(3.4-3.6 GHz)was designed.The finite element model of FBAR was established in COMSOL software,and different shape factors and piezoelectric film materials were analyzed,as well as the influence of C-axis orientation on FBAR performance.The Mason model of FBAR is improved,and the mechanical loss and dielectric loss parameters of the piezoelectric layer are introduced,which improves the accuracy of the FBAR simulation model.Based on CoventorWare software,an experimental simulation method was established for FBAR.A set of successful FBAR resonator chips was tested.The parameters of each parameter were taken as the reference measured data,and the experimental simulation process was reversed.Finally,the simulation results were obtained.It is almost consistent with the measured data and demonstrates the effectiveness of the experimental simulation method.The 5G communication band RF filter is built by FBAR unit.The in-band and out-band performance is optimized by using random algorithm and gradient algorithm.The optimal parameters of each FBAR unit are calculated and the performance of FBAR filter is obtained.The parameters all meet the technical requirements of 5G communication.According to the actual process standards,five FBAR layout files were designed and drawn,and the main processes and key process technologies for preparing air cavity type FBAR were selected and demonstrated,which facilitated the process combination process to select the optimal combination mode to prepare high performance.FBAR device.