Design Of Micro Cantilever Sensor With Embedded Channel

Micro cantilever is the most basic and typical micro structure in the MEMS devices,which is often used in micro sensors.Micro cantilever has attracted more and more attention in the field of micro biochemistry,such as micro particle and cell detection,because of its high sensitivity,small size and low cost.Micro cantilever sensor with embedded channel is taken as the research object in this paper,according to two different working modes of the micro cantilever with embedded channel,the bending deflection and resonance frequency changes of the micro cantilever under different loads are analyzed and simulated theoretically under different circumstances.By detecting the vibration frequency offset of micro cantilever,the mass of micro fluids can be quantitatively analyzed and calculated,and then the mass of micro particles or cells in micro fluids can be obtained.The main research work and achievements of this paper are as follows:?1?The working principle of the micro cantilever sensor with embedded channel.Firstly,two working modes of traditional micro cantilever sensor are introduced.The overall structure and the working principle of micro cantilever sensor with embedded channel are designed and briefly introduced,respectively.?2?Characteristic analysis of micro cantilever with embedded channel.Under the static and dynamic working modes,the relationship between the characteristics of the micro cantilever with embedded channel and the different loads is analyzed.Also,the relationship between the bending deflection and the position of the concentrated loads is studied for the case of uniform micro fluids and micro fluids containing micro particles.The bending deflection and frequency deviation of micro cantilever with uniform micro fluids and particles are discussed in detail.The influences of the self parameters of the micro cantilever and the mass of the particles on the sensitivity of the micro cantilever are studied.?3?The simulation analysis of micro cantilever with embedded channel.The bending deformation and vibration analysis simulation of a micro cantilever with embedded channel under the different cases of uniform micro fluids and particulates are carried out.By using the COMSOL Multiphysics APP developer to change the structural dimension parameters of the micro cantilever,the difference between the simulation results and the theoretical calculation results of the sensitivity of the micro cantilever with uniform micro fluids and particles is verified and compared.The error between simulation results and theoretical results is less than 8%.?4?Fabrication and testing of micro cantilever with embedded channel.Through the flow chart of the processing procedure of the micro cantilever with embedded channel,the micro cantilever with embedded channel is fabricated.Its size is 500 microns in length,90 microns in width,10 microns in thickness,20 microns in width and 5 microns in height of the micro channel.Using SCALA Mini micro cantilever detection system,the change of bending deflection of micro cantilever is detected.And the maximum bending deflection of micro cantilever is 2.74 um.The first-order resonance frequencies of micro cantilever is measured in air and micro channel full with water.The error between experimental results and theoretical results is less than 5%.Finally,the sensitivity of the micro cantilever with embedded channel is measured to be 3.35×10¹¹Hz/g.