On-Chip Optical Power Detection Using A Resistive Microheater In A Silicon Waveguide

Photonic integration technology has become one of the research hot topics in the field of optical fiber communications.In the near future,silicon photonics integration will be widely adopted in high speed,large capacity information network systems.Because of the advantages such as simple process,low cost and CMOS compatibility,all silicon photodetectors play a critical role in photonic integrated circuits.This thesis studies all silicon photodetectors based on resistive waveguide microheaters.The goal is to realize real-time on-chip optical power detection with high sensitivity,wide dynamic range and low cost.The working principle and relevant theoretical background are introduced first.The all silicon photodetector and real-time on-chip optical power detection are then investigated with simulation and experiment.In addition,this thesis also studies the relationship between thermal tuning and on-chip optical power detection in the silicon photonic devices.Silicon waveguides can be simultaneously monitored while they are thermally tuned.The validity and reliability of the detectors have been verified.Experimental test results show that optical power detection in the silicon waveguide has a high sensitivity of-40 dBm and a large dynamic range of >50 dB.The minimum AC drive voltage for detection is only 5 mV.The optical power in the microring resonator can be simultaneously monitored while it is thermally tuned.When the optical power in the resonator is detected by the all-silicon photodetector,the perturbation of the drive signal to the optical transmission spectrum is extremely low.This guarantees the stability of the resonators during the optical signal processing.