Design And Fabrication Of Piezoelectric Micro Hexapod Robot

Micro crawling robot is a major research direction in the field of robotics,which combines bionics technology and applies new materials and new technologies.This paper discusses the research on micro hexapod robot based on piezoelectric actuation,and the research contains several subjects,such as bionics technology,kinematics,dynamics,mechanism design,micro-drive technology,and micro-processing technology.The paper focuses on the research of structure design,piezoelectric actuator design,dynamic model of robot,theoretical analysis of piezoelectric actuator model,micro fabrication,experiment system platform and experimental study.Firstly,the paper completes structure design of leg-linkage and piezoelectric actuator of micro hexapod robot based on the movement of hexapod insects.3D model and dynamic model have been used to analyze how the robot walks stably.Secondly,structure design and optimization of bimorph piezoelectric actuator also has been finished.Then,multi-layer material processing technology micro bionic hexapod robot is introduced base on MEMS process,and every part of the robot is been fabricated.Finally,an experiment platform is used to test the displacement response of a piezoelectric actuator with no load and load.and the influence on the whole robot is analyzed.The paper provides a novel structure design for the research on micro hexapod robot,and the design of structure with the processing technology has great significance for the further research.