Research On Software System Of Fine And Wide Three-dimensional Optical Measuring Instrument

For some special applications of precision parts,the wafer surface topography has strict technical requirements.With the progress of technology,there have been a variety of surface topography detection technology.There is a method of surface topography detection using optical interference theory.This method does not touch the object,so it has the advantages of high precision and high stability.And it has been widely used.In recent years,machine vision theory has been introduced into morphological detection techniques.Micro-surface detection technology has been upgraded.Morphology detection technology is developing with computer and hardware.In this paper,optical differential interference morphology detection technology is discussed.And build a machine vision system to achieve the detection of the micro-topography of the object surface.According to the hardware composition,The turntable provides optical phase shifting.Two-dimensional translation stage equipped with objects to be detected.High-resolution industrial cameras serve as the machine vision acquisition unit.The computer is used as the core processing unit of image algorithm and control algorithm.The stability and anti-jamming of the system are improved.It can also work in complex industrial environment.This paper develops the system of computer software.The software communicates with the mobile station controller through the serial port,communicates with the industrial camera through the Gigabit Ethernet.based on the above information,we set up the mobile station controller to control the rotary table and translation table.And design the camera driver to control the industrial camera to capture the image.Before the image is used to calculate the surface topography,the image needs to be preprocessed.For the characteristics of the camera to capture images,relying on image library design algorithm,including image segmentation algorithm,positioning algorithm,repair algorithm.And the interference image preprocessing is completed.According to system requirements,complete the system from experimental products to commercial products.In the software system design morphology detection,topography splicing,topography output.System control rotary table and industrial camera collaboration to complete the image of the object image acquisition and calculation.No extra operation is required.The size of the measurement area is entered by the user.The system completes the measurement of the surface morphology of the work,and automatically stitches the shape.The surface morphology is displayed by two-dimensional and three-dimension map.Thesystem can calculate information such as surface roughness and maximum undulation.Finally,according to the experimental feedback problem optimization software system,complete the entire software system development.