Study On The Fabrication Of Microfluidic Chip Mold Micro-electroforming

The 21 century is the era of rapid development of science and technology,and the traditional analytical technology is undergoing profound reform.Among them,the analysis equipment is being miniaturized,integrated and portable.Microfluidic chip is one of the fastest developing and most promising fields in the microanalysis system.It has the advantages of miniaturization,integration,small reagent consumption,good selectivity,fast analysis speed,low cost and so on.The technology has been gradually applied to many fields of clinical diagnosis,nucleic acid analysis,protein analysis,cell screening,and environmental monitoring,it has a broad development prospects,but now the microfluidic chip manufacturing process because of its complicated and the cost is still relatively high,the production efficiency is still relatively low and so it cannot be applied on large scale.This paper presents a method of micro electroforming process to fabricate microfluidic chip die manufacturing,the precision of electroforming process can reach nanometer level,adapt to manufacturing metal parts with complex shape and high precision,and the electroforming process is simple and convenient,low cost,convenient for mass production.By combining experimental research and numerical simulation,the micro electroforming microfluidic chip mold making process and properties are systematically studied,the finite element method as verifies the effect of the change of flow field and electric field of micro electroforming,so as to realize the optimization of the final process,finally puts forward the method of micro mold to hot embossing PMMA,to verify the performance of microfluidic chip mold.First of all to the metal substrate as the main research object,through the UV-LIGA technology made in the surface of the formation of micron micro channel mask,and then through the micro electroforming preparation of microfluidic chip mold method are researched respectively,the effects of current density,pulse frequency,temperature and ampere of micro electroforming mold after micro roughness the influence and the effect of process parameters on the micro mold size precision,trends and patterns of process variations are analyzed,in order to master the changes in the micro electroforming process of micro mold.Then,the two-dimensional flow field and electric field model of micro channel is established by COMSOL software finite element method.The electric field and the flow field distribution in the processing area are deeply studied by using this model,and the flow field distribution of different aspect ratio is analyzed.Finally,through the introduction of the working principle of the binding force,the experiment of the bonding force of the micro mold is carried out,and the optimum process parameters are obtained.Then,taking polymer PMMA as the main research object,we carried out a systematic study of the microfluidic micro mold embossing method,and studied the influence of temperature,pressure and time on the mold impression.Finally,we determined the process parameters used for the mold stamping.