Manufacture And Process Improvement Of Capacitive Displacement Sensor's Detection Units

The capacitive displacement sensor is the core component of the digital caliper,and it has wide application prospects in industrial technology.It's significant to study how to improve the production process,production efficiency and qualified rate.This thesis analyzes the magnetron sputtering coating and micro-machining in the process of manufacturing capacitive displacement sensors,and gives some reasonable solutions to solve the existing problems.As a result,process parameters have been optimized.These optimized parameters have important reference value for the improvement of production efficiency and qualified rate.Firstly,through testing and comparison,a set of reasonable steps for glass cleaning are summarized and the cleanliness of the glass substrate has improved greatly.It provides a necessary condition for the improvement of production efficiency and qualified rate.Secondly,in the heated state,a self-designed substrateframe is used in the process of magnetron sputtering coating,on this basis,the qualified rate is increased from 19.4% to 23.6%.At the same time,it is convinced that introducing more substrate positions does not significantly increase cross-contamination.Thirdly,on the basis of using the self-designed substrate frame,the heating method is used in the process,and the qualified rate is increased from12.5% to 23.6%.Fourth,the self-designed mask is used in the process of magnetron sputtering coating in order to produce the insolation layer and the protective layer.This can skip lithography and etching process so that the production efficiency can be increased obviously.Some key parameters are summarized and will contribute to further improvement of the process flow and the equipment structure.On this basis,the production efficiency and qualified rate can also be increased.