Research On Calibration And Compensation Technology Of MEMS Inertial Devices

Micro Electromechanical systems(MEMS)inertial devices,such as accelerometers and gyroscopes are featured with small size,low cost and low accuracy.With their wide usage in fields such as geomatics,aerospace,civil usage et.al.,the demand for the carrier's accuracy is becoming higher.Therefore,it is of practical value to research the error calibration technology of MEMS inertial device.In addition,the ambient temperature changes also have a great impact on MEMS inertial device measurements.The errors caused by temperature changes become the main factor that affect the accuracy of inertial devices,makes it becomes a key technical problem to reduce the influence of temperature errors.Based on the theories of inertial device structure,principle,application field and performance evaluation,the performance of inertial device is evaluated by Allan variance and spectrum analysis as the first step.Secondly,the accelerometer position calibration and gyroscope speed calibration compensation model and inertial device temperature error calibration compensation model are established based on the inertial device performance evaluation and temperature characteristic analysis.Finally,the error characteristics of the output information of the inertial equipment are analyzed by the experiments of accelerometer position,gyroscope velocity and the static large temperature interval of the inertial device to establish the calibration compensation model.The calculation process of error compensation method adopted in this paper is simple,easy to operate and has high real-time data acquisition.It can meet users needs for miniaturization,high precision,real-time and reliability.It can be applied to a variety of problems such as sensor fixed error processing,integrated navigation,with a certain application value in engineering.