Research On High Overload Dynamic Response Of Silicon Micro-machined Gyroscope

In recent years,silicon micro-machined gyros have been rapidly developed as an important part of MEMS devices.With the increasing complexity of its application environment,the reliability of device operation has become increasingly prominent.In this paper,the impact-resistant dual-mass silicon micro-machined gyroscope independently developed by the research group is the research object.The dynamic response of sensitive structures with high overload and the high-load dynamic response of driving and detection loops in working mode are studied.The research content is as follows:(1)Analysis of the dynamic response of gyroscope sensitive structures under high overload loads.A high overload dynamic response model of sensitive structure of silicon micro-machined gyroscope is established.Based on the model,the effects of impact load characteristic parameters and gyroscope structural parameters on high overload dynamic response are analyzed in detail.The nonlinear characteristics of the comb displacement signal detection process are studied.Based on the gyroscope with stop mechanism studied in this paper,the dynamic response process of comb displacement and capacitance detection signal under high overload load is analyzed.(2)Research on high overload dynamic response of driving axial direction in silicon microgyroscope working mode.The motion coupling process of the gyroscope when the in-phase mode and the inversion mode are simultaneously present is analyzed.A linearization model of the self-oscillating drive circuit is established,and an automatic gain control(AGC)loop controller design method is proposed based on the linear model.A simulation model of driving axial high overload dynamic response in gyroscope working mode is established.The influence of high overload load on the drive control loop and the influence of different mismatches on the left and right drive parts on the Coriolis detection signal are analyzed.(3)Research on high overload dynamic response of detecting axial direction in silicon micro-gyroscope working mode.The coupling process of different modes in the actual gyroscope motion is analyzed.The open-loop detection model of silicon micro-gyroscope is established.Based on the analysis of the open-loop detection transfer function,the unit negative feedback model of the closed-loop detection system is established,and the closed-loop controller design is carried out by using this model.A high-overload dynamic response simulation model for open-loop and closed-loop detection of dual-mass silicon micro-gyroscopes in working mode is established.Based on the model,the influence of high overload load on the open and closed loop detection system of the gyroscope and the influence of different mismatch conditions on the angular velocity detection are analyzed.The simulation results show that the closed-loop detection has better impact resistance than the open-loop detection.(4)Performance test for silicon micro-machined gyroscope.Referring to the domestic micro-mechanical gyroscope test details,the normal temperature performance test and the impact test are performed on the impact-resistant silicon micro-gyroscopes for open and closed loop detection respectively.The experimental results show that the simulation analysis can predict the actual impact response process of the gyroscope to a certain extent,and the closedloop detection circuit has better impact resistance than the open-loop detection circuit.