Determinant Ignition And Control Technology Of Micro Thruster Array

In this paper,micro-thruster arrays with determinant wiring structure are designed and fabricated based on low-temperature co-fired ceramic（LTCC）technology.Compared with the single-layer wiring structure of solid chemical micro-thruster arrays,they have the advantages of strong expansibility and easy logic control.At the same time,a matching ignition control system is designed by using STM32F103ZET6 single chip computer.Specific research contents are as follows:The determinant solid chemical micro thruster array consists of three layers:ignition circuit layer,chamber layer and nozzle layer.The ignition circuit layer of determinant solid chemical micro-thruster array was fabricated by low temperature co-firing ceramic technology,and the row location was realized by 1N4001 diode;epoxy resin material was selected as the chamber layer,the appropriate chamber size was designed by theoretical calculation,and the rationality of chamber size design was verified by simulating the heat transfer process by Comsol software;SOI material was selected as the nozzle layer,and the nozzle layer was fabricated by SOI material.The theoretical calculation shows that the thickness of SiO₂diaphragm should not be greater than 12.8μm.Ruthenium oxide igniting bridge and nickel-chromium alloy igniting bridge with different sizes were designed and manufactured.The electrical explosion and ignition performance of the igniting bridge were studied under constant pressure.The results show that the 10#RuO₂igniting bridge has the best performance under 40 V constant pressure,the ignition delay time is 273.1μs,the 6#Ni-Cr igniting bridge has the best performance under 15 V constant pressure,and the ignition delay time is 456μs.The optimum temperature rising process of the two types of igniting bridge was simulated by Comsol software.Finally,6#Ni-Cr igniting bridge is selected for the integration of determinant micro-thruster arrays.The ignition control system matched with the determinant micro-thruster array is designed.STM32F103ZET6 is selected as the main control chip,and MOS transistor is selected to design the driving circuit.The single-way row drive is simulated by Multisim software,and the ignition program and the upper computer control program are designed.The chamber bonding,diode chip bonding and interface circuit bonding of the determinant micro-thruster array are completed.The thrust performance of the determinant micro-thruster array is tested.The unit impulse is 30.2μN·s.The ignition performance of determinant micro-thruster arrays was tested by using control system.Under 15 V constant pressure excitation,the ignition delay time was 0.6 ms and the combustion duration was 3 ms.