Research On Key Techniques Of Multiple-Probe Cooperative Measurement For Composite Coordinate Measuring Machine

With the development of modern high-end equipment manufacturing industry,the machining accuracy of many workpieces has reached the level of micron or even submicron.Such workpieces tend to be complex in structure and be difficult to be measured.Contact measurement can achieve high-precision measurement of three-dimensional information of the object,and it has strong adaptability to the shape of the workpiece,but its measurement efficiency is low,and it produces a certain force with the measured part of deformation.Non-contact measurement has high sampling density and high measurement efficiency,but it is greatly influenced by environment.Therefore,in many cases,the traditional coordinate measuring machine with a single probe has been unable to meet the requirements of measurement and multi-probe high-precision composite measuring machines came into being.In order to realize high-precision measurement under the condition of multi-probe cooperation and improve measurement efficiency,the project of "development and application of composite high-precision coordinate measuring instruments" has been sponsored by the national large equipment special project.As the main participating part,our research group has studied some key techniques of multi-probe coordinate unification and fusion measurement for the third sub-task of the project.Based on the discussion of the method and the feasibility of the experiment,this paper makes use of the existing measuring machine ZIP 250,which is made by US OPG Company.With the support of Suzhou Tianzhun Technology Company and several metrology institutes,the work is summarized as follows:1.This paper introduces the composition and structure of the compound measuring system of our research group and introduces the selection and working principle of contact probe,image probe and spectral confocal probe.We proposed that the standard sphere is not the best one for coordinate unification and cooperative measurement of three detectors and experiments are carried out to verify and analyze the standard.In the work,a preliminary coordinate unification is made with the standard sphere for the three probes.2.Based on the measurement characteristics of three probe,a new high-precision first generation standard is designed,which is made of super-precision machining center and effectively improves the precision of coordinate unification.At the same time,based on the idea of array ball board,the first generation of array combined standard tool is designed and manufactured to verify the accuracy of the measuring machine in the workspace,and sent to several metrology institutes.The high precision and feasibility of the method of the standard are verified and results are compared.3.Based on the analysis of the advantages and disadvantages of the first generation of new standard,the second generation of new standard is designed,and its structure and the method of coordinate unification are introduced in order to maximize the advantages of three-probe measurement and avoid the systematic errors caused by different sensors when measuring the same characteristics.In addition,the second generation combined standard tool is designed based it,and the accuracy of the existing composite measuring machine is verified.The second generation combined standard tool is also sent to several metrology institutes for comparative experiments.