Studieson Ultra Precision Machining Technology Of Fast Tool Servo For Microlens Array

Microlens array optical components are small,light,and highly integrated.They are mainly used in imaging and lighting optical systems,so they are becoming more and more important to researchers.Based on the singlepoint diamond fast tool servo ultra-precision machining technology,this paper studies the process parameters of fast tool servo turning of micro lens arrays,and performs cutting experiments on rectangular planar microlens arrays.Firstly,the basic theory of singlepoint diamond fasttool servo turning technology is introduced,the structure of single-point diamond lathe and the classification of turning are given,and then the working principle of fasttool servo turning is explained in detail.Comparative analysis provided theoretical support for experimental research.Secondly,the process parameters of the microlens array for fasttool servo turning are studied,which are mainly divided into three parts: First,based on the characteristics of the microlens array,the surface shape is simulated and analyzed.According to different surface shape characteristics,different types of the selection of single-point diamond tool parameters corresponding to the microlens array,and then based on the characteristics of the high-frequency response of the fasttool servo Z axis,the compensation method of the tool radius in fasttool servo turning is optimized Second,according to the characteristics of the fast tool servo equipment with the maximum frequency limitation,the process parameters of the fast tool servo turning of the microlens array are optimized and selected,which mainly include the number of sampling points,the spindle speed and the feed speed.Third,based on the linearization error theory,according to the overcutting of the microlens array sub-lens edge,an edge interpolation method is proposed to reduce the edge overcutting of the microlens array.Simulation results show that this method can effectively improve the contour accuracy of the microlens array.Finally,a rectangular planar microlens array was fabricated using Nanoform 700 Ultra precision single-point diamond lathe and FTS 1000 fast tool servo equipment.The programming before turning,the correction of tool setting errors and the design of the entire experimental parameters were studied.The processed workpiece was inspected by a white light profiler and step instrument.The obtained roughness was 10 nm,and the contour accuracy was 0.29 μm.Theedge of sub-lens profile was good,and no overcutting occurred.