Research On Key Technologies Of High Precision And Low Defect Processing For Quartz Pendulum

Quartz pendulum accelerometer is one of the key devices in flight navigation,gravity measurement,vibration detection and other fields at present.The core component of quartz pendulum accelerometer is the quartz pendulum.At present,the quartz pendulum formed through traditional process has been widely used.However,in the field of high precision,quartz pendulum still has a problem of insufficient surface accuracy,difficulty in removing surface damage and subsurface defects,and difficulty in improving the surface figure accuracy of small area.In this paper,the small diameter ion beam figuring is studied and tested around the high precision and low defect processing of quartz pendulum,and the flatness error of the quartz pendulum convex plate is reduced.The surface damage of the quartz substrate is analyzed,and the damage removal process is completed by the magnetorheological polishing.The main research contents of the thesis include:1.Based on the working principle and theoretical model of quartz pendulum,the effect of quartz pendulum on the performance of accelerometer is studied.According to the material characteristics,shape and size of quartz pendulum and existing processing methods,the difficulties in processing and manufacturing are analyzed.2.In order to solve the problems in the processing of quartz pendulum,a method of small diameter ion beam figuring is proposed for the small size characteristics of quartz pendulum.The processing capability and acquisition method of small diameter ion beam is analyzed,and the special fixture for quartz pendulum and its substrate applied to ion beam machining are designed.Combining with positioning compensation analysis and function removal analysis,the processing experiment of the three convex plate of the quartz pendulum is completed,which improves the planeness of the quartz convex plate and verifies the ability of the small diameter ion beam figuring.3.The surface damage characteristics of quartz substrates are analyzed.The magnetorheological polishing method with low process defect characteristics is proposed,and the processing experiment is completed to verify the ability of the magnetorheological polishing for removing damage on quartz substrates.The surface defects are removed and surface roughness improvement is realized.4.For the processing difficulties and application requirements of quartz pendulum,a new process flow is proposed by combining small diameter ion beam figuring and magnetorheological polishing.It provide a good foundation for the manufacture of high precision quartz pendulum accelerometers.