Research On Self-destruction Device Based On MEMS Technology

Self-destruction is a mechanism that allows devices to destroy themselves in a predefined environment.Currently,the application of self-destruction technology is very extensive.Losing or stolen smartphones is a common occurrence in daily life.To prevent the leakage of personal information,adding data self-destruction to mobile phones is a future development trend.Degradable implantable medical devices have brought good news to many patients.The most prominent feature of this device is that it will “self-destruct” after completing certain functions in the body,without the need for secondary surgery,reducing the risk of surgical infection.In a complex battlefield environment,in order to prevent high-tech equipment from falling into the enemy for reuse or redevelopment,the equipment needs to be destroyed in a controlled manner.It is not difficult to see that self-destruction technology is an emerging technology with development potential.In this paper,a self-destruct device based on MEMS technology is designed and studied.The device is mainly composed of MEMS isolation film structure,MEMS impact structure and MEMS lock structure.The main contents of the research include:(1)The isolation membrane structure was designed and studied.In order to ensure the isolation membrane can be completely broken,the penetration simulation of MEMS hammer impact isolation membrane was made with ANSYS/ ls-dyna software.The simulation results show that the isolation membrane ruptured in a large area,which lays a foundation for the subsequent demonstration of the reliability of the self-destruct device.(2)The impact structure of MEMS is designed and studied.Energy storage and energy release should be considered in the design of impact structure.In the process of energy storage,six key conditions in the motion of the lever shaft are analyzed in detail,and the relationship between the rotation Angle and the MEMS hammer displacement is given.In the process of releasing energy,the serpentine spring of releasing structure is analyzed and simulated.The simulation results are basically consistent with the trend of theoretical values,and the relative errors are all less than 10%.This conclusion is of great significance for the subsequent design of locking structure.(3)The locking is divided into mechanical locking and electrostatic locking.Traditional mechanical locking can not be self-driven problem,this paper designed a swing locking structure to achieve self-driven.Conventional electrostatic locking has the problem of excessively high driving voltage,which is about 300 V.Cascade structure can reduce the driving voltage,but it has the problem of large occupation area and complex processing technology.Therefore,this paper designs a fan type rotating comb tooth structure,which can basically overcome the above problems,and analyzes the capacitance and torque of the structure,and gives relevant design parameters.After design,the driving voltage of the structure is significantly better than the traditional electrostatic locking,which is about 50 V.(4)Finally,the complete structure and principle of the self-destruct device and the key dimensions of the whole device are given.According to the size,the layout was drawn in l-edit software,and the processing technology of MEMS isolation film and MEMS hammer was given.The traditional MEMS isolation film processing technology was improved,and the yield of the film was increased by 20%.