Design And Manufacture Of The Point Source Autostigmatic Microscope

The location of the center of curvatures and the focus of spherical and aspherical optical components in the optical system is one of the key problems in the optical alignement.This article designs and develops point source autostigmatic microscope,which is suitable for solving this problem.The instrument is based on the principle of spherical wave autostigmatic,and has many functions such as quickly locating the center of curvature of the curved surface,detecting of the degree of deviation of the center of curvature,obtaining star point image and determining aberration characteristics.It has the advantages of low cost,small size,easy alignment,high flexibility,multi-function and so on.This work focuses on the design of autostigmatic microscope optical systems and the development of the prototypes.Itmainly includs following contents:First,the composition and measurement principle of point source autostigmatic microscope is give out,the relationship between the detection resolution and the focal length of the tube lens,the magnification of the microscope objective lens,and the detector pixel size is analyzed.Furthermore,the methods and examples to determine the angular resolution,focal resolution and measurement range of point source autostigmatic microscope are presented.Next,The point source autostigmatic microscope optical system including transmission autostigmatic system and Kohler illumination system are designed.The image acquisition software is developed and,the prototype assemble process and performance test results of the autostigmatic microscope is introduced.The test results show that the angular resolution and alignment resolution of the prototype have respectively reached 1.79"and 0.086 ?m.Through the integrated design of the optical-mechanical structure,the prototype will be small size and portability.As an example of application,the principle prototype of the point source autostigmatic microscope is used to assemble the Offner convex grating spectral to verify the functionof the prototype.The adjustment results show that location error of the center of curvatures of the two off-axis concave mirrors can be controlled within 10 ?m,and the imaging performance of the imaging spectral system is satisfied.The point source autostigmatic microscope developed in this paper has the advantages of small size,high precision,low cost and quickly alignment.It has the potential to develop to be an optical workshop product,and it is expected to be widely used in the alignment and test of the reflective optical systems.