Research On Testing Technology With Aspheric Mirror Profile

The aspherical optical elements in optical system can not only reduce the number of optical elements and reduce weight,reduce system size,simplify the structure of the instrument and to correct the aberration,and improve the imaging quality,also can increase the degree of freedom in the optical design,reduce the cost.So in modem optical system has been widely used.Due to the development of the processing characteristics of infrared Ge special materials and single point diamond turning technology,design and processing technology of infrared aspheric optics and its application has been the rapid development of optical aspheric surface has excellent optical properties,in the space camera,is widely used more and more important aspect of large telescope and infrared guidance etc.the key technology in the field of national defense and civilian products.Optoelectronic profilometer testing as the primary means of testing aspheric surface,with the development of aspheric design and processing technology,puts forward higher requirements for detection of surface parameters of aspheric optical components.The detection instrument in the existing conditions,the detection range expansion instrument.To improve the detection accuracy of aspheric surfaces.The main research work of this paper includes the following aspects:combined with a Taylor Hobson PGI 1240 contacting contour instrument test system,derived contour test data,through the MATLAB software testing of a single line results were fitted with rough outlines tester test results were compared and MATLAB to verify the algorithm's correctness;with the standard spherical mirror,profilometer testing system,through improved methods tested by MATLAB software,and the test data were fitted to obtain the 3D morphology,and laser interferometer comparison of the results,verify the algorithm is correct;the accurate test of aspheric surface is realized by experiment;the measurement uncertainty of the test system is analyzed,and the synthetic uncertainty of the test system is estimated.