Research On Piezoelectric Electrode Of Cylindrical Shell Resonator

In recent years,PZT has been widely used in the navigation field as an excellent piezoelectric material.In the field of navigation,PZT materials are applied to the preparation of solid wave gyro resonator piezoelectric electrodes?Pt/PZT material/Pt?by virtue of their ability to excite and feel high-frequency vibrations,among which the most widely used in the cylindrical shell resonator.At this stage,the cylindrical shell resonators are all block-shaped piezoelectric electrodes,and are fixed on the resonator by bonding.The bulk piezoelectric electrode will greatly reduce the quality factor of the resonator,thereby reducing the measurement accuracy of the resonator.In this paper,a thin film piezoelectric electrode?Pt/PZT film/Pt?was fabricated on two quartz cylindrical shell resonators by MEMS technology and sol-gel method.The preparation process of PZT thin film was studied.The investigation process of PZT film preparation is divided into two schemes:the first one is to prepare piezoelectric electrodes on quartz substrate,and the PZT film quality is improved by optimizing the two parameters of single spin coating thickness and annealing time in sol-gel method.The second scheme is to prepare a piezoelectric electrode on a quartz substrate deposited with a silicon nitride transition layer,thereby realizing the transition of the linear expansion coefficient of the quartz substrate to the PZT film,and reducing the probability of cracking of the PZT film.The performance of the two schemes of PZT thin films was tested,including XRD crystal orientation analysis,dielectric properties analysis,leakage current analysis and ferroelectric performance analysis.The specific analysis results are as follows:The XRD crystal orientation test of the PZT thin film in Scheme 1 shows that the 110 crystal orientation intensity of the PZT thin film increases gradually with the increase of the annealing time,but the increasing amplitude gradually decreases.It is shown that as the annealing time increases,the crystallization of crystal grains inside the PZT film is more sufficient,the less the amount of pyrochlore ore and oxygen vacancy defects are generated and the larger the proportion of perovskite.The XRD crystal orientation analysis of PZT film in Scheme 2 shows that it has a strong 110 crystal orientation,which indicates that the PZT film has a good perovskite structure inside;The leakage current test results of schemes 1 and 2 show that when the annealing time is 5 min and the single-spin coating thickness is 40 nm,the leakage current of PZT film is the smallest,which can reach 2.5x10^-9A;The dielectric properties of the first and second schemes show that the PZT film has the best dielectric performance when the annealing time is 5 min and the single spin coating thickness is 40 nm.The relative dielectric constant ranges from 1492 to 1307.The test results of ferroelectric properties of schemes 1and 2 show When the annealing time is 5 min and the thickness of single spin coating is 40nm,the PZT film has the best ferroelectric property,and the positive and negative residual polarizations reach 13.51?c/cm² and-12.83?c/cm²,respectively.In summary,it can be seen that when the annealing time is 5 min and the single spin coating thickness is 40 nm,the prepared PZT film has relatively good piezoelectric properties.A quality factor measuring device was built to test the quality factors of the two cylindrical shell resonators,and the quality factors were 395258 and 526428,respectively,which were far superior to those of other bulk piezoelectric electrode resonators.