| The angle is the basic measurement parameters.Angle encoder is the most widely used angle measuring device,and the reliability of its measurement results has a significant impact on key aspects in industrial production,transportation,medical diagnosis,engineering surveying and so on.In order to ensure the accuracy and reliability of the measured value of the angle encoder,it is necessary to carry out the calibration of the angle encoder.Aiming at the demanding of high precision angle encoder calibration,this paper presents a numerical simulation method of the action mechanism of the position deviation of the sensitive elements of the standard rotary table on angle measurement error,full range high density calibration method and error component Fourier series analysis method for 0°~360°.It solves the technical problems of maintaining the accuracy of the standard device under complex working conditions,separating the error of measurement results and optimizing the parameters of the system,and realizes the integrated calibration of angle measurement error,separation and compensation of the angle encoder.The main research contents are as follows:1.Research on the mechanism of angle measurement error: The mathematical model of the action mechanism of the position deviation of the circular grating on the angle measurement error in the standard rotary table is established,and the numerical simulation experiment are carried out.The quantitative relationship between the sensor algorithm parameters and the error separation effect is obtained,and experimental verification is carried out;2.Study on standard rotary table system: Develop standard rotary table based on self-calibration principle,design adaptive angle encoder mounting fixture,develop standard turntable,angle encoder,angle measuring instrument hardware interface program,software algorithm,develop standard turntable and be Fully automatic calibration software for angle encoders;3.Traceability of standard rotary table value: Refer to the calibration procedure of the relevant measuring instrument and the calibration method to design the standard traceability method of the standard rotary table,and perform the measurement accuracy of the measuring standard for the indexing error,subdivision error and rotation error of the standard rotary table.Repeatability experiment;4.Designing the traceability route of angular encoder,a high density calibration method of 0°~360° is proposed.The calibration experiments of angular encoder with different accuracy levels are carried out,and the effect of error separation is verified. |