Development Of Experimental System And Application Research Based On 3D Resonant Trigger Probe

With the decrease of component sizes and increase of the integration,Micro-nano coordinate measuring machine becomes more and more important to achieve high-precision measurement of micro components.The most important part of the measuring machine is the probe system,which is responsible for scanning or triggering the structure of micro components.Probe research is one of the hotspots and difficulties in the home and abroad measurement fields at present.Probes are commonly classified by trigger style,which can be divided into contact probe,non-contact probe and vibrating probe.The vibrating probe is superior to the contact probe in measuring force,and is superior to the non-contact probe in measuring performance.A novel three-dimensional resonant probe is developed in our laboratory,which is composed of a tuning fork and an optical fiber.Based on the theoretical analysis and simulation of the probe,the relevant experimental system is designed to test the real performance of the probe,and the structure of the probe is optimized.Moreover,research on the practical application of the probe is carried out.In this thesis,the main contents are described as follows.(1)The related structure for probe experiment is designed.A bonding system is specifically designed to assist the manufacturing process of the probe,thus improving the fabrication efficiency and success ratio.A measurement and positioning system based on the probe is built to test the performance of the probe and measure the shape of the sample.In addition,some adjustable fixtures are designed for different samples to meet the various requirements for the samples in the probe experiment.(2)The development of the control software is completed.The experimental control interface is designed and the programs are compiled to link the entire measurement system to achieve probe performance testing and sample measurement.At the same time,image feedback function is added to the software to reflect the measurement process in real time.(3)The optimization of the probe structure is carried out.In view of the problem that the stem length of the resonant probe is too short,a simple and easy-to-operate scheme is designed to effectively increase the length of the probe stem.Through this scheme,the rod length is significantly increased from the original 1mm to 5mm,and favorable performance of the probe is maintained.As a result,the probe can be used for high aspect ratio microstructure measurement for the increasement of the stem length.(4)The probe performance test and application research are implemented.Various experiments are designed to test the performance of the probe,and these data are used to reflect the performance of the probe.To demonstrate the application effect of the probe,the three-dimensional shape of the injection hole of a needle valve body is measured,and the measurement data is used to solve the important geometric parameters of the injection hole.Moreover,a solution by applying the probe to hole depth measurement is proposed.