| With the development of modern industrial society,the application of micro-positioning technology in precision processing,fine operation and other fields is more and more advanced,and its performance requirements are also higher and higher.It is of great significance to develop a micro-positioning system with high positioning accuracy,large positioning journey and strong carrying capacity.In this paper,giant magnetostrictive actuator is used as displacement driving device,flexible hinge platform is used as displacement driving mechanism,and a micro-positioning workbench which can realize positioning in X-Y plane is built.The micro-positioning system is composed of core controller TMS320F28335 DSP and other components.The main contents are as follows.Based on J-A hysteresis model,a mathematical model of micro-positioning worktable is established.Aiming at the six unknown parameters(a,Ms,a,k,c,γ),an adaptive inertia coefficient particle swarm optimization algorithm is proposed to identify the parameters.The hardware,DSP,and the software,MATLAB,are used as the running environment of the algorithm,and the effectiveness of the algorithm is compared and analyzed.At the same time,the reliability of the model is verified by comparing the calculated results with the measured data.From the hardware and software design of control system,the hardware mainly chooses and designs the peripheral interface of controller,excitation power supply,sensor and other equipment.In the software part,LabVIEW is used to design the upper computer control and display interface,the lower computer DSP control program,including serial communication,AD acquisition and other real-time control code segments.An Open-loop test platform was built to measure the performance parameters of the micro-positioning worktable.The feedforward + PID control strategy is selected to realize the unidirectional point control and continuous displacement tracking control of micro positioning worktable X,and the unidirectional positioning effect is analyzed.The positioning effect of X-Y plane of micro-positioning worktable is analyzed by comparing the relationship between X-output displacement and excitation current under different Y-direction positions.The experimental data show that the positioning distance of the micro-positioning worktable in X direction is 33.8 um,in Y direction is 38.5 um,and the maximum positioning error in X direction is 0.855 um,which shows good repeatability in a certain range of X-Y plane.Figure[47] Table[6] Reference[55]... |