Research On Key Techniques In Data Fusion And Collaborative Measurement Of Multiple Probes

With the processing and manufacturing industry on the instrument measurement accuracy,stability and other aspects of the increasingly high demand,the traditional contact coordinate measuring machine as a strong adaptability,high precision measurement tools are gradually moving towards integration,automation,intelligent direction.Among them,the composite coordinate measuring machine integrates different types of measuring sensors such as contact probes,image probes,laser probes,etc.,to meet more and more strict measurement tasks.Compared to the traditional single sensor measurement of the coordinate measuring machine,the advantage of composite measuring machine is that it combines the characteristics of different types of sensors.So it will show better performance in the applicability,accuracy,flexibility and other aspects.The research group has been doing the research on the multi-probe data fusion technology and the collaborative measurement method under the support of the national large scientific equipment development special project "compound high precision coordinate measuring instrument development and application".This paper will focus on the measurement of different parameters of the probe itself and the coordinate measuring machine error calibration technology.All the work will lay a good foundation for the subsequent collaborative measurement and data fusion.In this paper,the existing ZIP-250 composite coordinate measuring machine from US OGP company is the experimental platform for the theory.The laser sensor installed in its Z-axis,the instrument’s overall Z-axis and the image sensor on the instrument are the targets of the research.For their respective parameters or errors,this paper proposes several specific calibration programs.On this basis,this paper verifies the feasibility of the method and verifies the specific value of each parameter or error,and analyzes the influencing factors of the calibration process,and finally draws the conclusion and puts forward the prospect.The main work is summarized as follows:(1)Aiming at the perpendicularity error of the optical axis of the laser sensor,a method of calibrating with the standard of the double slant standard and the sine theorem is proposed,and the deviation of the spectral confocal sensor relative to the plane of the table is obtained.Value,analysis and simulation of the impact of the measurement accuracy of the factors are also proposed in this paper.(2)Aiming at the perpendicularity error of the Z-axis of the composite coordinate measuring machine with respect to the XOY plane,an error calibration method based on image measurement is proposed.The actual error of the Z-axis is obtained,and the accuracy and feasibility of the method are proved by laser interferometer measurement.(3)According to the parameter calibration of telecentric imaging system,the imaging model and parameter calibration principle are introduced,and the calibration plate is designed and calibrated.In addition,the influence of the factors such as the pattern and specification of the calibration plate on the calibration results is analyzed,and the optimization values of each factor are determined.