Research On Micro Groove Machining Process Based On Tool Trajectory Motion

Microgrooves,as one of the functional microstructures,are used in many fields,such as microfluidic and drag reduction surfaces.On some characteristic parts,microgrooves are also an important component,such as elastic sensitive elements,array structures,etc.In the micro groove machining of metal surface,it is relatively difficult to process the microgrooves with dozens of microns and wide,and the tool path motion processing method can better fill this vacancy.The existing research based on tool path motion processing has fully demonstrated its excellent processing ability in this scale,but still has great processing potential,such as plane processing,and the processing of dozens of microns and wide grooves.In this paper,the cutting force model is built based on the characteristics of tool path motion processing.The cutting process is analyzed,the influence of different processing parameters on the plane machining and groove machining is discussed,and the process flow of the micro groove machining is planned.The specific research contents include the following aspects:First,a cutting force model based on three pyramid tool path motion machining is established,and each cutting cycle is divided into several parts.The changing rules of the undeformed cutting thickness,the forward angle and the cutting force are analyzed with the tool trajectory moving process.Calculate and analyze a certain forward direction.Then,a series of experiments are carried out to study the machining capability based on tool path machining.The working characteristics of the piezoelectric displacement table are studied,and the working parameters of the piezoelectric displacement table are determined.Through comparison and analysis of cutting force and surface topography under different forward direction,the influence of feed direction and cutting depth on cutting force,prismatic burr,side smoothness,groove width and bottom morphology of the cutting force,cutting depth and other factors are revealed.The effects of cutting depth,feed speed,processing method and step volume on surface roughness during plane machining are studied.Finally,the effect of multiple cutting tools on the surface roughness of the micro groove and the bottom of the groove is studied.The influence of different processing methods and process paths on the side profile of the micro groove and the fillet radius at the corner of the groove is studied.Using the best parameter combination and tool deflection method,the technological process of processing T or rectangular micro grooves with tens of microns deep and two hundred microns in width is planned.