Design Of The Semi-physical Simulation System Of MEMS Gyroscope Based On LabVIEW

Due to the characteristics of processing technology,there is always a dimensional error that cannot be corrected in MEMS gyroscopes.Because of the difference between the gyroscopes,the key signals of the gyroscope are identified to facilitate the selection of suitable gyroscopes,the circuit parameters are matched so as to achieve better working conditions,the effects of environmental factors are monitored to facilitate the evaluation of the performance of the gyroscope.In order to solve the above problems in the selection and circuit debugging process,a semi physical measurement and control system composed of three parts,LabVIEW program,gyroscope and circuit,is designed.The thesis firstly studies the closed-loop drive principle of gyroscope.On the basis of the derivation of transfer function and the simulation of Simulink software,an automatic gain control algorithm is designed.Combined with the algorithm and hardware,the amplitude oscillation of the gyroscope is realized.Through the study of the demodulation algorithm,the open loop detection of the gyroscope is realized and then,the scale factor experiment is carried out.Therefore,the function of the gyroscope and the function of angular velocity detection are realized.Then,the key signal parameter identification algorithm of the gyroscope is designed.Through the algorithm,the working parameters of the gyroscope can be obtained,such as the signal waveform,the resonant frequency of the driving mode,the amplitude of the driving detection signal,the phase difference of the demodulated signal,and so on.Therefore,the selection efficiency is improved.After theoretical derivation of the parameters affecting the scale factor of the gyro,the LabVIEW algorithm is designed to improve the scale factor,which satisfies the nonlinear requirements.After obtaining the working state parameters of the appropriate scale factor,the program will calculate the parameters of the circuit element that meets the requirements to provide the basis for circuit debugging.At last,the influence of temperature and vibration on the gyroscope is analyzed to design the temperature compensation algorithm.In this temperature compensation algorithm,the resonant frequency is taken to characterize the temperature.During the experimental test,the stability of bias is increased by 2 orders of magnitude after the temperature compensation.The effect of the vibration is monitored by the program,and the bias and its stability of the gyro are analyzed before,during and after the vibration test.Through the semi physical system,the stability of the gyroscope,the state monitoring and the identification of the key signal parameters are realized.At the same time,the program provides parameter matching and environmental factor analysis algorithm which improve the efficiency of gyro selection,circuit debugging and performance evaluation.