Research On Temperature Compensation Technology Of Micromechanical Silicon Oscillating Accelerometer Based On Temperature Sensitive Structure

Micromechanical silicon oscillating accelerometer is one of MEMS accelerometer with potential high performance,which has broad application prospects in military field and civil field.Temperature change can seriously affect the performance of micromechanical silicon oscillating accelerometer,solving the temperature adaptability problem is helpful to the practical application of this technique.In this paper,temperature compensation method of temperature sensitive structure is designed and this method is based on existing structure of micromechanical silicon oscillating accelerometer,the main contents of this paper are list as follows:(1)The basic principles of micromechanical silicon oscillating accelerometer are stated from header,closed loop drive circuit and frequency measurement circuit.(2)The effect of temperature change on zero bias,scale factor,noise and quality factor of micromechanical silicon oscillating accelerometer is analyzed by means of formula derivation.(3)Determing form,basic frequency,size and layout of temperature resonator;Doing simulation analysis for temperature structure to prove its feasibility,includeing static analysis,impulse response analysis and harmonic response analysis.Processing technology of micromechanical silicon oscillating accelerometer is introduced;modeling and analysing air damping of temperature resonator.(4)Dividing experiment into four parts:calibration experiment,normal temperature experiment,constant temperature experiment and varying temperature experiment;Least square method model and neural network model are used to establish temperature model for temperature compensation of experiment data;The results show that least squares method model is better than the neural network model and correlation between zero bias with temperature resonator is greater.