Research On Rotation Error Of Ultra Precision Spindle Based On Optical Interference Measurement Method

The spindle rotation error is one of the important factors that affect the precision of the machined parts.Research on spindle rotation error is of great significance for finding the source of error,predicting the surface shape error of machining parts and improving the machining accuracy of ultra precision machine tools.In this paper,the rotary error of the aerostatic spindle is studied with the ultra precision flying cutting machine as the research object.In view of the working principle of the machine tool and the structure characteristics of the aerostatic spindle,the tilt error of the spindle inclination has the greatest influence on the machining precision.A new method for measuring the rotation error of ultra precision hydrostatic spindle based on interference fringes is proposed in this paper.By analyzing the regularity of the shape change of the interference fringes,the calculation model of the spindle rotation motion is set up based on interferometric image processing,and the spindle tilt error is obtained.Based on the principle of phase shifting interferometry,through theoretical modeling,a mathematical model is established between the interference fringe and the spindle rotor motion,and the shape of interference fringes were simulated,the simulation results were consistent with the experimental phenomenon,which confirms the accuracy and reliability of the new method.Image processing steps such as grayscale processing,smoothing filtering,expansion corrosion and edge detection are applied to obtain interference fringes with clear edges and better continuity.The distance and direction of the interference fringes are solved in the relative coordinate system,and based on the mathematical model established,the spindle tilt error is solved.The assembly error of optical flat is one of the important factors affecting the measurement results of spindle rotation error.so the design of a clamp adjusting device for spindle rotation error measurement of optical flat special equipment.The optical flat crystal adjustment experiment was carried out,and the precision adjustment of the optical flat crystal was realized.A system for measuring the rotation error of the aerostatic spindle of ultra precision flying cutting machine tool is set up.Measurement experiment of spindle rotation error of ultra precision flying cutting machine tool is carried out,and the change law of the spindle tilt error is obtained.The comparison of measurement results and error source analysis is made.The experimental results show the accuracy and effectiveness of the method in this paper.