Research On Controllable Fabrication Of Liquid Metal Micronano Structure

As an important branch of nanotechnology,micro-nano structure processing technology determines the application and promotion of nanotechnology in the future social life.When the application of micro-nano processing technology in various materials is very mature,the integrated circuit manufacturing process can break through the current bottleneck and reach a new height.The ability to manufacture micro-nano structures with controlled specifications in designated areas is the key to this field.Atomic force microscope probe is an important tool in the field of nanomanipulation and processing,which can achieve high-precision positioning and detection.It can perform nano-cutting,writing,droplet manipulation,electric field assisted processing,etc.Compared with lithography machine technology,it can be more convenient and lower cost.The traditional processing of liquid metal structures is limited by the influence of oxide films and can only reach the scale of tens of microns.Therefore,manufacturing liquid metal structures with smaller feature sizes in designated areas is the focus of research nowadays.In this thesis,I propose a new method for preparing liquid metal micro-nano structures using AFM probes under the mechanism of field evaporation.By applying bias to the tip of the probe,the liquid metal micro-nano structure was successfully processed.This method can achieve the smallest scale that can be achieved in this field at present,has the advantages of high precision,controllability,high efficiency,low cost and so on,and has important application value in many fields in social life.Firstly,based on the characteristics of the liquid metal itself and the current available tools for nanomachining,the principle of using field evaporation with a probe tip is proposed.For the process of field evaporation and distribution of liquid metal,the Image Hump model and Charge Exchange model were used for theoretical analysis,and the electric field distribution at the tip was analyzed.Based on this theory,a specific strategy for the preparation of liquid metal micro-nano structures is proposed.Secondly,combined with theoretical analysis,a liquid metal nano manipulation platform was built.The commercial self-induction AFM probe has been transformed into a conductive AFM probe.Labview was used to write the control program of the host computer,which controlled the motion platform to realize the automatic preparation of liquid metal micro-nano structures with controllable specifications.The performance of the experimental platform was checked after calibration.It has reached the parameter index of a commercial atomic force microscope.Finally,I studied the experimental process when the probe was dipped in liquid metal.By changing the energization time,the energization voltage,the type of the substrate,and the dynamic electric field parameters,I summarize and analyze the effects of each experimental parameter on the processing of liquid metal micro-nano structures.The applied analysis and research of the fabricated liquid metal micro-nano structures were carried out,including the application of catalysis for the growth of silicon nanowires,the application of nanopatterning,and the application of Nanoscale data storage.