Research On Process For Micro Rounded Diamond Tools Based On FIB And SPH Cutting Simulation

As an important part of ultra-precision cutting,the lapping quality of micro rounded diamond tools will directly affect the processing quality of the material and the working life of the tools.There is still a large space for the development of diamond tools’ edge lapping technology.The conventional cutting tools’ edge lapping method,mechanical lapping method,is relatively mature and the only means of mass production at present.While other special processing methods,such as focused ion beam etching method,are in the research stage.In this paper,the Focus Ion Beam(FIB)etching process of diamond tools was studied in detail and the feasibility scheme of micro rounded diamond tools machining based on FIB was proposed.Meanwhile,related exploration was carried out on the cutting parameters of diamond tools by means of SPH cutting simulation.The selection of ion beam parameters,optimization of ion beam focusing,and machining methods and steps in FIB etching method are important factors to control the quality of cutting tools etching.There are very few studies on diamond cutting tools’ rounded edge which use FIB to process at present.Therefore,this research focuses on FIB etching process of diamond cutting tools,and carries out the Stopping and Range of Ions in Matter(SRIM)simulation and experiment research on ion voltage,beam current strength,residency time,machining Angle and other parameters in FIB etching.Establishing the FIB etching scheme of micro rounded diamond tools on the basis of the conclusion of the simulation and experiment.And processing cutting tools with tooth shape microstructure on a rounded tool.Comparing the roughness of cutting tools that processed by FIB etching and mechanical lapping that using AFM measured,both of these two cutting tools’ surface are available.And FIB etching method processing of diamond tool rationality is verified.The choice of ultra-precision cutting parameters has an important impact on tool performance and surface quality of the processed materials.Experiments are a basic and effective method to study cutting parameters,and simulation can also be used as an auxiliary means to explore the impact of different parameters on machining during cutting.At present,the research results on 3-D cutting simulation are still far less than the 2-D simulation results.In this topic,the 3-D simulation of ultra-precision cutting based on Smoothed Particle Hydrodynamics(SPH)method is launched for the ultra-precision cutting of copper materials with micro-rounded diamond tools.As a meshless method,SPH method is derived from the finite element method(FEM)which calculation method is very different from the FEM.This topic researched the process of establishing a simulation model for ultra-precision cutting,established a SPH-FEM coupled cutting model for diamond tools to cut copper,and explored the effects of cutting speed,cutting depth and feed amount on the cutting process.Those studies provide a reference for the cutting of copper at the nanometer scale.