Development And Experimental Research Of Micro-Nano Dual-Mode Detection And Processing Module

As the foundation of advanced micro-nano technology,micro-scale functional structure has put forward more and more strict requirements in terms of detection and processing,including complex curved surface forming and cross-scale periodic array processing.Although micro-nano processing technologies,including optical exposure and focused ion beam processing,have matured,we still hope to apply the high-precision and high-efficiency characteristics to the micro-nano field by drawing on the advantages of macro-scale mechanical processing.From this,a micro-mechanical detection and processing system based on micro-scale tools is derived.The atomic force microscope AFM based on probe technology is widely used in material micro-morphology detection and multi-form material removal processing,but it has the disadvantages of low robustness and small processing scale.and the micromechanical system derived from AFM optimization also has the characteristics of relatively high stiffness and poor load resolution,so this topic builds a set of micro-nano dual-mode detection and processing modules suitable for ?N level to m N level cross-scale load applications.The main content of the project research is as follows:Firstly,the principle and mechanical model are studied around the micro-nano dualmode detection and processing module,and the indirect load measurement method is determined through scheme optimization,and the normal force control is realized by using two working modes of static contact and dynamic quasi-contact.Parameter design,finite element simulation and process optimization are adopted for the flexible microbeam of the core part of the module,and finally the batch preparation of parts is realized.Based on the purpose of compact design,the structure design of the whole machine is completed,and the appropriate sensor type is selected and the structure after assembly meets the requirements of distance adjustment.Finally,the working module is integrated with the controller and the multi-axis motion module to complete the system construction.Secondly,the parameter calibration and system application research of the static contact system are carried out.The linear rigidity calibration of the single-arm and crossshaped flexible micro-beams was achieved by using force sensors;the anti-jamming closed-loop system was built based on the PID controller,and the static system threshold load was calibrated by the Nano-Indenter.The static contact system is applied to the standard template 3D scanning imaging,and the effect is good.At the same time,the nano-indentation process research is completed.Finally,the grating array microstructure with good optical diffraction characteristics is successfully prepared.Finally,the dynamic quasi-contact system is studied around hardware,signal analysis and structure.The load test within the working bandwidth of the excited piezoelectric ceramics is completed.Numerical filtering analysis of the source signal verifies the feasibility of the phase-locked output,and the amplitude linear output optimization is completed based on the phase-locked amplifier.Through frequency sweep experiment and stepping motion test,the system modal and normal resolution are calibrated.Finally,in order to improve the system output stability,the flexible microbeam structure was optimized based on finite element simulation analysis.The results show that the special-shaped structure design can ensure the improvement of the modal frequency while taking into account its weak normal stiffness and high plane direction stiffness characteristics.