Adjusting Surface Morphology Of Diamond Layer To Improve Service Performance Of Diamond Composite Film

Due to its excellent properties,diamond composite films are being developed and used in high-tech fields such as new high-power electronic devices and precision machining.Unfortunately,the surface morphology of diamond layer is not suitable,which makes the performance of diamond composite film poor,and it is difficult to meet the working conditions.In order to improve the performance of diamond composite films,firstly,the influence of the composition and surface morphology of diamond layer with Ar volume ratio was investigated.Secondly,Diamond/ZnO and Ti/Diamond composite films with different diamond layer morphology were prepared by chemical vapor deposition and magnetron sputtering.The relationship between the surface morphology of diamond layer and the performance of diamond composite films was discussed.The main conclusions are as follows:（1）The effect of Ar volume ratio on the surface morphology of diamond layer was investigated.Diamond layer was deposited on silicon substrate by chemical vapor deposition（CVD）.The surface morphology of diamond layer was investigated under four argon volume ratios（20%,40%,60%,80%）.With the increase of AR ratio,the morphology of diamond layer changed from granular morphology to agglomerate like morphology,the grain size decreased from 1.38μm to 0.12μm,the orientation of grain（111）increased,and the surface roughness first decreased and then increased.When Ar/（Ar+H₂）is 60%,the diamond particle size is 0.35μm,and the surface roughness of diamond layer is as low as34.5 nm.（2）Adjust surface morphology of diamond layer to improve the performance of Diamond/ZnO.Using RF magnetron sputtering technology to deposit ZnO layer on the surface of four kinds of diamond layers,the relationship between the surface morphology of diamond layer and the morphology and structure of ZnO layer was explored:（I）The change of surface roughness of diamond layer caused the change of ZnO nucleation and particle size,and then caused the change of ZnO layer morphology.（II）The preferred orientation of（002）ZnO layer is affected by the preferred orientation and roughness of the underlying diamond.When the diameter of diamond layer is 0.35μm,Diamond/ZnO Composite film shows the lowest surface roughness（6.4 nm）and high preferred orientation of ZnO（002）.It is expected to meet the performance requirements of surface wave devices.（3）The performance of Ti/diamond composite film was improved by adjusting the morphology of diamond layer.Using medium frequency magnetron sputtering technology and chemical vapor deposition technology,Ti/Diamond composite film was deposited on the surface of fax38 steel sheet and punch pin.When Ar/（Ar+H₂）is 60%,Ti/Diamond composite films show compact,low roughness and good substrate adhesion.At the same time,the performance of Ti/Diamond composite film punching needle is improved.